Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1997-02-11
1998-01-06
Nguyen, Kiet T.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250396R, H01J 37147
Patent
active
057058202
ABSTRACT:
A deflection magnetic system and method are provided to deflect an electron beam through a predetermined angle while maintaining a circular cross-section for the electron beam. A plurality of spaced magnetic fields are provided to deflect the electron beam through angles less than the total predetermined angle, but the total angle is achieved when the beam passes through the last magnetic field. Magnetic shields are provided between the spaced magnetic fields to absorb any undesired leakage magnetic flux.
REFERENCES:
patent: 3691374 (1972-09-01), Leboutet
patent: 3867635 (1975-02-01), Brown et al.
patent: 4389572 (1983-06-01), Hutcheon
"Focusing Of Charged Particles", vol. II, 1967 Issued by Academic Press, pp. 223-225.
Kaminou Yuichiro
Urano Susumu
Wakamoto Ikuo
Yamashita Ichiro
Meller Michael N.
Mitsubishi Jukogyo Kabushiki Kaisha
Nguyen Kiet T.
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