Coating processes – Direct application of electrical – magnetic – wave – or... – Ion plating or implantation
Patent
1998-03-19
1999-11-02
Padgett, Marianne
Coating processes
Direct application of electrical, magnetic, wave, or...
Ion plating or implantation
427566, 427580, 20419238, 20429841, C23C 1414, C23C 1400, H05H 150
Patent
active
059766360
ABSTRACT:
An electric arc ion plating apparatus to coat a metal material on an object includes: (a) an vacuum chamber; (b) an electric arc bombardment chamber in the vacuum chamber, comprising an anode, a cathode target, and an arc triggering electrode to generate metal particles when a voltage is applied on the anode and the cathode, and on the arc triggering electrode; and (c) a magnetic coil having a longitudinal axis. The magnetic coil emanates from the electric arc bombardment chamber and encloses at least a part of the electric bombardment chamber. The magnetic coil contains a constant-diameter section enclosing and immediately emanating from the electric arc bombardment chamber to guide the metal particles away from the cathode and toward the object, and a varying-diameter section away from the electric arc bombardment chamber to provide optimum distribution of the metal particles before they reach the object surface. The varying-diameter section can be a diverging section for effectively coating relatively large objects, or a converging section for efficiently coating a relatively small object.
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Webster's 9th New Collegiate Dictionary, excerpts p. 947 & 405, 1990 no month.
Chang Wei-Jieh
Chen Shau-Yi
Huang Shinn-Cherng
Lee Yuh-Wen
Leu Ming-Sheng
Industrial Technology Research Institute
Liauh W. Wayne
Padgett Marianne
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