Magnetic actuator producing large acceleration on fine stage and

Details Magnetic actuator producing large acceleration on fine stage and Magnetic actuator producing large acceleration on fine stage and

1998-02-12

2000-10-10

Ip, Paul

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318632, 318593, G05B 501, G05B 1118

Patent

active

061305170

ABSTRACT:
A pair of complementary magnetic actuators controls a stage in a high-precision positioning instrument in a single coordinate direction. Additional pairs of complementary magnetic actuators can be used to provide control of the stage in other coordinate directions. A small current through the windings of both magnetic actuators provides a zero net force on the fine stage, thus maintaining the position of the fine stage. The small current used to control the fine stage minimizes the RMS power gain. By increasing the current in one magnetic actuator while decreasing the current in the other, a net force is generated for large accelerations of the stage. Control of the magnetic actuators is simplified by simultaneously increasing and decreasing the current through the windings of the complementary magnetic actuators prior to accelerating the stage. Additionally, a feedforward command can control the magnetic actuators to decrease the settling time of the system.

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