Magnet structure for electron-beam heated evaporation source

Details Magnet structure for electron-beam heated evaporation source Magnet structure for electron-beam heated evaporation source

1989-05-22

1990-08-07

Envall, Jr., Roy N.

Industrial electric heating furnaces

Electron beam furnace device

Vaporizing furnace

H01J 37305

Patent

active

049474049

ABSTRACT:
A crucible contains a metal to be evaporated by heating from an electron beam source wherein the path of the electrons is controlled by a horizontal transverse magnetic field over the source and crucible. A number of small individual magnets are arranged horizontally along opposite sides of the crucible parallel to the beam path. The inner end of each magnet is in the closest position possible to deliver its flux lines to the magnetic field area. By varying the positions of the magnets, the field generated may be controlled in the desired manner.

REFERENCES:
patent: 4064352 (1977-12-01), Mann

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