Magnet housing for a sputtering cathode

Details Magnet housing for a sputtering cathode Magnet housing for a sputtering cathode

1994-08-24

1996-11-05

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20419212, 20429809, 20429822, C23C 1434

Patent

active

055713939

ABSTRACT:
A magnetron cathode having a magnet housing which encloses a magnet array and has a cooling fluid passage therethrough. The magnet housing fills a significant portion of the cathode leaving a passage of relatively low cross-section for cooling fluid flow between the magnet housing and a cathode wall. The magnet housing may be hermetically sealed to prevent magnet corrosion and may be provided with rollers which engage the cathode wall to prevent magnet housing deformation due to magnetic forces.

REFERENCES:
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patent: 4417968 (1983-11-01), McKelvey
patent: 4422916 (1983-12-01), McKelvey
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patent: 4445997 (1984-05-01), McKelvey
patent: 4466877 (1984-08-01), McKelvey
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patent: 5096562 (1992-03-01), Boozenny et al.
patent: 5100527 (1992-03-01), Stevenson et al.
patent: 5200049 (1993-04-01), Stevenson et al.
M. Wright et al., "Design advances and applications of the rotatable cyllindrical magnetron," Journal of Vacuum Science and Technology A, vol. 4, No. 3, May/Jun. 1986, pp. 388-392.

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