Machining of lithium niobate by laser ablation

Details Machining of lithium niobate by laser ablation Machining of lithium niobate by laser ablation

2005-10-04

2005-10-04

Wells, Nikita (Department: 2881)

Glass manufacturing

Processes of manufacturing fibers, filaments, or preforms

Process of manufacturing optical fibers, waveguides, or...

C065S385000, C219S121680, C219S121640, C359S245000, C359S237000

Reexamination Certificate

active

06951120

ABSTRACT:
Machining of crystalline lithium niobate is carried out utilizing a laser having a beam with a wavelength near the absorption edge of lithium niobate. The laser beam is provided in pulses of short duration and at a repetition rate selected to ablate the surface of the lithium niobate without damaging the bulk material. Translation of the laser beam and the substrate with respect to each other can be carried out to define a trench of a desired geometry in the lithium niobate.

REFERENCES:
patent: 4820897 (1989-04-01), Lefevre
patent: 4940302 (1990-07-01), Houk et al.
patent: 5128007 (1992-07-01), Matsunaga et al.
patent: 5271957 (1993-12-01), Wernberg et al.
patent: 5310448 (1994-05-01), Bordui et al.
patent: 5393371 (1995-02-01), Chang et al.
patent: 5561549 (1996-10-01), Hatori et al.
patent: 5728603 (1998-03-01), Emesh et al.
patent: 6069729 (2000-05-01), Gill et al.
patent: 6128030 (2000-10-01), Kikuchi et al.
patent: 6172791 (2001-01-01), Gill et al.
patent: 6337465 (2002-01-01), Masters et al.
patent: 6432278 (2002-08-01), Sugioka et al.
patent: 6545791 (2003-04-01), McCaughan et al.
Kazuto Noguchi, et al., “A Broadband Ti:LiNbO3 Optical Modulator with a Ridge Structure,” J. of Lightwave Technology, vol. 13, No. 6, Jun. 1995, pp. 1164-1168.
M. Levy, et al., “Fabrication of single-crystal lithium niobate films by crystal ion slicing,” Appl. Phys. Lett., vol. 73, No. 16, Oct. 19, 1998, pp. 2293-2295.
V.A. Joshkin, et al., “Growth of oriented lithium niobate on silicon by alternating gas flow chemical beam epitaxy with metalorganic precursors,” Appl. Phys. Lett. vol. 76, No. 15, Apr. 10, 2000, pp. 1-3.
D. Saulys, et al., “An examination of the surface decomposition chemistry of lithium niobate precursors under high vacuum conditions,” J. of Crystal Growth, vol. 17, 2000, pp. 287-301.
I.-L. Gheorma, et al., “Thin Layer Design of X-Cut LiNbO3 Modulators,” IEEE Photonics Technology Letters, vol. 12, No. 12, Dec. 2000, pp. 1618-1620.
I.P. Kaminow, et al., “Loss in Cleaved Ti-Diffused LiNbO3 Waveguides,” Appl. Phys. Lett. vol. 33, No. 1, Jul. 1, 1978, pp. 62-64.
R.S. Weis, et al., “Lithium Niobate: Summary of Physical Properties and Crystal Structure,” Appl. Phys. A 37, 1985, pp. 191-203.
Kazuto Noguchi, “Millimeter-Wave Ti:LiNbO3 Optical Modulators,”J. of Lightwave Technology, vol. 16, No. 4, Aug. 1998, pp. 615-619.
V. Joshkin, et al., “Two-stage Growth of Patterned Epitaxial Lithium Niobate for Photonic Application,” IUVSTA 15th International Vacuum Congress (IVC-15), Nov. 1, 2001, abstract printed from worldwide web Oct. 30, 2001.
F.K. Christensen, et al., “Sub-band-gap laser micromachining of lithium niobate,” Appl. Phys. Lett., vol. 66, No. 21, May 22, 1995, pp. 2772-2773.
I. Bauman, et al., “Generation of Submicron Surface Gratings in Li NbO3 by Pulsed UV-Laser Ablation,” Annual Report, 1995, Universitat Poderborn, pp. 24-25.
L. Kovacs, et al., “Composition dependence of the ultraviolet absorption edge in lithium niobate,” Appl. Phys. Lett., vol. 70, No. 21, May 26, 1997, pp. 2801-2803.
M. Levy, et al., “Fabrication of single-crystal lithium niobate films by crystal ion slicing,” Appl. Phys. Lett., vol. 73, No. 16, Oct. 19, 1998, pp. 2293-2295.
Tadashi Ichikawa, et al., “Li NbO3 platforms for optical fiber alignment.” Toyota Central Research and Development Labs, Inc., 1998, pp. 1-16.
S. Mailis, et al., “Fabrication of surface relief gratings on lithium niobate by combined UV laser and wet etching,” Electronics Letters, vol. 36, No. 21, Oct. 12, 2000, pp. 1801-1803.

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