Metal working – Method of mechanical manufacture – Electrical device making
Patent
1996-04-10
1998-03-03
Vo, Peter
Metal working
Method of mechanical manufacture
Electrical device making
2960316, 360113, 451 5, G11B 5127, G11B 539, B24B 4902
Patent
active
057221553
ABSTRACT:
An electrical lap guide (ELG) and a method of using the same to control the machining of a surface of a magnetic transducer to obtain a desired transducer height are disclosed. The transducer and ELG are fabricated in a deposition of layers on a substrate. The ELG includes a first resistor aligned with the transducer such that a machined height of the first resistor is indicative of a machined height of the transducer. Resistances of second and third resistors of the ELG are measured. A sheet resistance of the deposition of layers and a quantity of wafer processing edge movement are determined as functions of the measured resistances of the second and third resistors. An expected non-machined resistance of the first resistor is determined as a function of the determined sheet resistance and as a function of the determined quantity of edge movement. A non-machined resistance of the first resistor is measured. The expected non-machined resistance of the first resistor is compared to the measured non-machined resistance of the first resistor to determine an amount of error.
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Hao Shanlin X.
Keel Beat G.
Stover Lance E.
Seagate Technology Inc.
Vo Peter
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