LTCC-based modular MEMS phased array

Details LTCC-based modular MEMS phased array LTCC-based modular MEMS phased array

2007-10-30

2007-10-30

Wong, Don (Department: 2163)

Communications: radio wave antennas

Antennas

Microstrip

C343S853000, C029S600000, C029S601000

Reexamination Certificate

active

10474818

ABSTRACT:
The present invention uses low temperature co-fired ceramic (LTCC) technology for fabrication of micro-electro-mechnical systems (MEMS) based phase shifters. As a result, low-cost subarray modules can be constructed using LTCC, and the subarray modules (10) can be used as building blocks for large antenna arrays. In an exemplary description of the present invention, all layers of the multilayer subarray modules, including MEMS, are in LTCC. As a result, a significant cost reduction for satellite terminals using highly integrated LTCC subarray modules.

REFERENCES:
patent: 6154176 (2000-11-01), Fathy et al.
patent: 6781065 (2004-08-01), Palmteer
patent: 2003/0143884 (2003-07-01), Kung et al.
patent: 2004/0113840 (2004-06-01), Gottwald et al.
patent: 2004/0130490 (2004-07-01), Jenabi
patent: 2004/0252059 (2004-12-01), Zaghloul et al.
patent: 2005/0057415 (2005-03-01), Rawnick et al.

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