LSI temperature control system

Details LSI temperature control system LSI temperature control system

1989-07-19

1991-10-01

Ford, John K.

Heat exchange

Regenerator

Checker brick structure

165 30, 165 39, 165 40, 165 804, 165101, 16510433, 62185, 62201, 622284, 361385, F25B 2900, F25B 4900, H01L 2346, F28D 1500

Patent

active

050524720

ABSTRACT:
An LSI temperature controlling system has closed LSI cooling water circuit, and a refrigeration circuit including a motor-driven refrigerant compressor, a first heat exchanger for exchanging the heat of the LSI cooling water and the refrigerant and a second heat exchanger for exchanging the heats of the refrigerant and another fluid. The motor speed is controlled by an inverter the operation of which is controlled based on the temperature of the LSI cooling water measured by a temperature detector. A heater is used to suppress dew formation on LSI substrates.

REFERENCES:
patent: 2917685 (1959-12-01), Wiegard
patent: 3214153 (1965-10-01), Hauff et al.
patent: 4037045 (1977-07-01), Beriger et al.
patent: 4109707 (1978-08-01), Wilson et al.
patent: 4177649 (1979-12-01), Venema
patent: 4512161 (1985-04-01), Logan et al.
patent: 4621678 (1986-11-01), Hahn et al.
patent: 4656836 (1987-04-01), Gilbertson
patent: 4729424 (1988-03-01), Mizuno et al.
patent: 4865123 (1989-09-01), Kawashima et al.
patent: 4873838 (1989-10-01), Voorhis et al.
Nikkei Electronics, Water Cooled System of Closed Loop Type, Jun. 17, 1985, pp. 243-266.

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