LPE Apparatus with improved thermal geometry

Details LPE Apparatus with improved thermal geometry LPE Apparatus with improved thermal geometry

1982-03-10

1984-09-11

McIntosh, John P.

Coating apparatus

Immersion or work-confined pool type

Work-confined pool

118415, H01L 21208

Patent

active

044703686

ABSTRACT:
In LPE boat-slider apparatus the boat, which carries the melts, is made of lower thermal conductivity material than the slider, which carries the substrate. Illustratively, the boat comprises sapphire and the slider comprises graphite. A confined-melt geometry is also described in which another slider, used to skim off thin portions of the melt, is also made of the lower thermal conductivity material.

REFERENCES:
patent: 3690965 (1972-09-01), Bergh et al.
patent: 3741825 (1973-06-01), Lockwood et al.
patent: 3770518 (1973-11-01), Rosztoczy et al.
patent: 3950195 (1976-04-01), Rode et al.
patent: 4201623 (1980-05-01), Sumner
patent: 4359012 (1982-11-01), Nishizawa
Journal of Crystal Growth, 1981, "Use of Sapphire Liners to Eliminate Edge Growth in LPE (Al, Ga)As," Tamargo et al., pp. 325-329.
Applied Physics Letters, Aug. 1, 1981, "Low Threshold Current Density in GaAsP/InP Lasers Grown in a Vertical Liquid Phase Epitaxial System," Tamari et al., pp. 185-187.

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