Coating processes – Direct application of electrical – magnetic – wave – or... – Electromagnetic or particulate radiation utilized
Patent
1998-05-18
2000-09-19
Padgett, Marianne
Coating processes
Direct application of electrical, magnetic, wave, or...
Electromagnetic or particulate radiation utilized
427597, 427 78, C23C 1428, B05D 512
Patent
active
061208574
ABSTRACT:
Short-wavelength photons are used to ablate material from a low work function target onto a suitable substrate. The short-wavelength photons are at or below visible wavelength. The elemental composition of the deposit is controlled by the composition of the target and the gaseous environment in which the ablation process is performed. The process is carried out in a deposition chamber to which a short-wavelength laser is mounted and which includes a substrate holder which can be rotated, tilted, heated, or cooled. The target material is mounted onto a holder that spins the target during laser ablation. In addition, the deposition chamber is provided with a vacuum pump, an external gas supply with atomizer and radical generator, a gas generator for producing a flow of molecules on the substrate, and a substrate cleaning device, such as an ion gun. The substrate can be rotated and tilted, for example, whereby only the tip of an emitter can be coated with a low work function material.
REFERENCES:
patent: 5242706 (1993-09-01), Cotell et al.
patent: 5254832 (1993-10-01), Gartner et al.
patent: 5294870 (1994-03-01), Tang et al.
patent: 5368681 (1994-11-01), Hiraoku et al.
patent: 5389606 (1995-02-01), Face
patent: 5411772 (1995-05-01), Cheung
patent: 5490912 (1996-02-01), Warner et al.
patent: 5601966 (1997-02-01), Kumar et al.
patent: 5608287 (1997-03-01), Hung et al.
patent: 5672210 (1997-09-01), Moto et al.
patent: 5702281 (1997-12-01), Huang et al.
patent: 5707745 (1998-01-01), Forrest et al.
patent: 5733609 (1998-03-01), Wang
patent: 5747120 (1998-05-01), McLean, II et al.
patent: 5866975 (1999-02-01), Gartner et al.
patent: 5897790 (1999-04-01), Koga et al.
patent: 6057233 (2000-05-01), Nakamura et al.
Balooch Mehdi
Dinh Long N.
Siekhaus Wigbert J.
Carnahan L. E.
Padgett Marianne
The Regents of the University of California
Thompson Alan H.
LandOfFree
Low work function surface layers produced by laser ablation usin does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Low work function surface layers produced by laser ablation usin, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Low work function surface layers produced by laser ablation usin will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1070053