Low voltage micro switch

Details Low voltage micro switch Low voltage micro switch

2006-09-19

2006-09-19

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S328000

Reexamination Certificate

active

07109641

ABSTRACT:
A low voltage micro switch includes a substrate having an actuating space therein; an actuating unit having a piezoelectric material extended in a cantilever beam shape from a portion of the substrate to the actuating space of the substrate and a bias electrode; a conductive signal line extendedly formed at a certain interval from one side of the substrate and having a disconnected portion; a supporting unit connected to the actuating unit, positioned in the actuating space, and moving according to actuation of the actuating unit; a switching unit formed at the supporting unit and connecting or disconnecting the disconnected portion of the conductive signal line according to movement of the supporting unit; and one or more ground units formed at the substrate.

REFERENCES:
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patent: 6377438 (2002-04-01), Deane et al.
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patent: 2005/0236935 (2005-10-01), Ohmori et al.
Fox et al., “Development of micromachined RF switches with piezofilm actuation” Proceedings of the SPIE—The International Society for Optical Engineering SPIE-Int.Soc. Opt. Eng USA, vol. 4700, 2002, pp. 40-49, XP008058086 ISSN:0277-786X.

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