Electrical generator or motor structure – Non-dynamoelectric – Thermal or pyromagnetic
Reexamination Certificate
2011-04-05
2011-04-05
Tamai, Karl I (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Thermal or pyromagnetic
C310S309000
Reexamination Certificate
active
07919901
ABSTRACT:
The current invention provides a stepping actuator, achieving large range up to ±35 μm with low operating voltages of 15V or lower and large output forces of up to ±110 μN. The actuator has an in-plane-angular deflection conversion which allows achieving step sizes varying from few nanometers to few micrometers with a minor change in the design. According to certain embodiments of the invention, the stepping actuator comprises a geometrical structure with a displacement magnification ratio of between 0.15 and 2 at operating voltages of 15V or lower. The present invention also provides a method for forming such stepping actuators.
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Erismis Mehmet Akif
Hoof Chris Van
Neves Hercules Pereira
Puers Robert
IMEC
Katholieke Universiteit Leuven K.U. Leuven R&D
McDonnell Boehnen & Hulbert & Berghoff LLP
Tamai Karl I
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