Low-voltage, large displacement stepping actuator and method...

Electrical generator or motor structure – Non-dynamoelectric – Thermal or pyromagnetic

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C310S309000

Reexamination Certificate

active

07919901

ABSTRACT:
The current invention provides a stepping actuator, achieving large range up to ±35 μm with low operating voltages of 15V or lower and large output forces of up to ±110 μN. The actuator has an in-plane-angular deflection conversion which allows achieving step sizes varying from few nanometers to few micrometers with a minor change in the design. According to certain embodiments of the invention, the stepping actuator comprises a geometrical structure with a displacement magnification ratio of between 0.15 and 2 at operating voltages of 15V or lower. The present invention also provides a method for forming such stepping actuators.

REFERENCES:
patent: 6400655 (2002-06-01), Kim
patent: 6675578 (2004-01-01), Sinclair
patent: 2004/0074234 (2004-04-01), Howell et al.
patent: 2004/0263028 (2004-12-01), Pei et al.
patent: 2005/0016605 (2005-01-01), Sherman et al.
patent: 2005/0211313 (2005-09-01), Sherman et al.
patent: 2006/0261702 (2006-11-01), Harada et al.
patent: 2007/0228868 (2007-10-01), Park et al.
patent: 2009/0019847 (2009-01-01), Erismis et al.
patent: 05344753 (1993-12-01), None
Erismis et al., “A low-voltage large displacement larger force inchworm actuator”, Journal of Micromechanical Systems, vol. 17, No. 6, Dec. 2008.
Yeh et al., “single mask, large force, and large displacement electrostatic linear inchworm motors” Journal of Microelectromechanical systems, vol. 11, No. 4, Aug. 2002.
Sarajlic, E. et al., “High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology”, IEEE 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun. 5-9, 2005, Korea, 53-56.
De Boer, M. P. et al., “High-Performance Surface-Micromachined Inchworm Actuator”, Journal of Microelectromechanical Systems, 2004, 13(1), 63-74, Feb. 2004.
Tas, N. et al., “The Shuffle Motor: A High Force, High Precision Linear Electrostatic Stepper Motor”, IEEE International Conference on Solid-State Sensors and Actuators, Jun. 16-19, 1997, Chicago, 777-780.
Gianchandani, Y. B. et al., “Bent-Beam Strain Sensors”, Journal of Microelectromechanical Systems, 5(1), 1996, 52-58, Mar. 1996.
European Search Report for Application No. 08156898.2 dated Nov. 28, 2008.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Low-voltage, large displacement stepping actuator and method... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Low-voltage, large displacement stepping actuator and method..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Low-voltage, large displacement stepping actuator and method... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2667840

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.