Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-10-11
2005-10-11
Dang, Hung Xuan (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S223100, C359S224200, C359S225100, C359S629000, C385S015000, C398S082000, C398S086000
Reexamination Certificate
active
06954301
ABSTRACT:
A low-voltage electromechanical device including a tiltable microplatform, method of tilting same and array of such devices are provided. The tiltable or steerable microplatform utilizes a bent-beam actuator to achieve large tilting angles with low actuation voltages. Thin beams of the actuator are bent in such a way as to cause the microplatform to pivot around a dimple support that generates a torsional force leading to angular motion in suspension beams attached perpendicular to the thin beams and, in turn, leading to angular or tilting motion in the suspended microplatform. Some of the key features include (1) the low-voltage bent-beam actuator; (2) a dimple-supported microplatform with a hole underneath in the substrate to allow light to pass through and to allow unhindered tilting of the microplatform; and (3) a method for constructing a microprism on the tiltable transparent microplatform for color dispersion purposes in an adaptive vision system.
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Nguyen Clark T.-C.
Xie Yuan
Brooks & Kushman P.C.
Dang Hung Xuan
Martinez Joseph
The Regents of the University of Michigan
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