Data processing: structural design – modeling – simulation – and em – Simulating electronic device or electrical system
Reexamination Certificate
2011-05-24
2011-05-24
Jones, Hugh (Department: 2128)
Data processing: structural design, modeling, simulation, and em
Simulating electronic device or electrical system
C703S002000
Reexamination Certificate
active
07949508
ABSTRACT:
A method for a geometry of a lateral comb drive for an in-plane, electrostatic force feedback, closed-loop, micromachined accelerometer or closed-loop Coriolis rate gyroscope device, or closed-loop capacitive pressure or force measuring device. When vibration is applied to the device, the error in the time-average output, which is vibration rectification error, due to this input vibration is minimized or eliminated. The geometry resulting from practice of the present invention is space-efficient because drive force is maximized while vibration rectification is minimized or eliminated.
REFERENCES:
patent: 1160574 (2001-12-01), None
Walied A. Moussa, et al.; Investigating the reliability of electrostatic comb-drive actuators used in microfluidic and space systems using finite element analysis; Canadian Journal of Electrical Engineering, Oct. 2002.
Francis E.H. Tay, et al.; A differential capacitive low-g microacccelerometer with mg resolution; Sensors and Actuators, S.A. Lausanne, CH, Oct. 2000.
John D. Grade, et al.; Design of Large Deflection electrostatic Actuators; Journal of Microelectromechanical Systems, Jun. 2003.
Ilya Avdeev, et al.; Strongly coupled three-dimensional finite element transducer; Mounal of Micromechanics and Microengineering, vol. 14. 2004 pp. 1491-1502.
Black Lowe & Graham PLLC
Honeywell International , Inc.
Jones Hugh
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