Low thermal mass semiconductor wafer support

Details Low thermal mass semiconductor wafer support Low thermal mass semiconductor wafer support

2008-06-30

2011-10-25

Novosad, Jennifer E. (Department: 3637)

Supports: racks

Special article

Platelike

Reexamination Certificate

active

08042697

ABSTRACT:
A support for a semiconductor wafer includes a plate having a support surface for supporting the wafer and a recessed surface spaced from the support surface and spaced from the wafer. A plurality of holes extends from the recessed surface, and the support surface is free of holes to inhibit contamination of the wafer.

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