Low thermal expansion ceramic and member for exposure system

Details Low thermal expansion ceramic and member for exposure system Low thermal expansion ceramic and member for exposure system

2006-09-26

2006-09-26

Group, Karl (Department: 1755)

Compositions: ceramic

Ceramic compositions

Refractory

C501S087000, C501S089000, C501S090000, C501S096100, C501S096300, C501S097400, C501S100000, C252S502000, C252S504000, C252S516000, C252S518100, C252S521300

Reexamination Certificate

active

07112549

ABSTRACT:
A low-thermal-expansion, rigid and wear-resistant ceramic is provided. The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected from the group consisting of carbides, nitrides, borides and silicides of group IVa elements, group Va elements and group VIa elements, and boron carbide. The ceramic has a porosity of 0.5% or less and a thermal expansion coefficient, at 10° C. to 40° C., of 1.5×10−6/° C. or less.

REFERENCES:
patent: 4098725 (1978-07-01), Yamamoto et al.
patent: 4855259 (1989-08-01), Claussen et al.
patent: 5023215 (1991-06-01), Cleveland
patent: 6953538 (2005-10-01), Takahashi et al.
patent: 2003/0139280 (2003-07-01), Takahashi et al.
patent: 1298104 (2003-05-01), None
patent: 58-15081 (1983-01-01), None
patent: 58-26075 (1983-02-01), None
patent: 9-283401 (1992-11-01), None
patent: 4-323850 (1997-10-01), None
patent: 11-079830 (1999-03-01), None
patent: 11209171 (1999-08-01), None
patent: 11-343168 (1999-12-01), None
patent: 2000-219572 (2000-08-01), None
Translation of Japanese document 58-26075, Feb. 1983.

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