Low temperature preparation of ultrafine oxide particles using o

Chemistry of inorganic compounds – Oxygen or compound thereof – Metal containing

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423579, 423594, 502338, C01B 1314

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active

051339552

ABSTRACT:
The present invention relates to a method for the preparation of ultrafine oxide particles using organized reaction media. Integrated circuit (IC) densities have necessitated the use of ultrahigh purity process fluids in state of the art fabrication facilities. It is the purpose of the present invention to synthesize monodispersed submicron particles of some representative contaminants, such as ultrafine oxide particles, using organized reaction media, and study their characteristics in relation to their removal from process fluids.

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patent: 4425261 (1984-01-01), Stenius et al.
patent: 4713233 (1987-12-01), Marsh et al.
patent: 4714692 (1987-12-01), Abrevaya et al.
patent: 4714693 (1987-12-01), Targos
patent: 4758414 (1988-07-01), Gifford et al.

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