Chemistry of inorganic compounds – Oxygen or compound thereof – Metal containing
Patent
1988-12-22
1992-07-28
Morris, Theodore
Chemistry of inorganic compounds
Oxygen or compound thereof
Metal containing
423579, 423594, 502338, C01B 1314
Patent
active
051339552
ABSTRACT:
The present invention relates to a method for the preparation of ultrafine oxide particles using organized reaction media. Integrated circuit (IC) densities have necessitated the use of ultrahigh purity process fluids in state of the art fabrication facilities. It is the purpose of the present invention to synthesize monodispersed submicron particles of some representative contaminants, such as ultrafine oxide particles, using organized reaction media, and study their characteristics in relation to their removal from process fluids.
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Phule Pradeep P.
Raghavan Srini
Risbud Subhash H.
Arizona Technology Development Corporation
Durando Antonio R.
Morris Theodore
Squillante Edward
Weiss Harry M.
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