Coating processes – Optical element produced – Transparent base
Reexamination Certificate
2007-05-08
2007-05-08
Turner, Archene (Department: 1775)
Coating processes
Optical element produced
Transparent base
C427S162000, C427S249100, C427S249170
Reexamination Certificate
active
10991985
ABSTRACT:
A method of forming a hydrogenated amorphous germanium carbon (α-GeCx:H) film on a surface of an infrared (IR) transmissive material such as a chalcogenide is provided. The method includes positioning an IR transmissive material in a reactor chamber of a parallel plate plasma reactor and thereafter depositing a hydrogenated amorphous germanium carbon (α-GeCx:H) film on a surface of the IR transmissive material. The depositing is performed at a substrate temperature of about 130° C. or less and in the presence of a plasma which is derived from a gas mixture including a source of germanium, an inert gas, and optionally hydrogen. Optical transmissive components, such as IR sensors and windows, that have improved abrasion-resistance are also provided.
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Dalakos George Theodore
Flanagan Kevin Warner
Johnson James Neil
Lockheed Martin Corporation
Scully , Scott, Murphy & Presser, P.C.
Turner Archene
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