Low temperature photochemical vapor deposition of alloy and mixe

Details Low temperature photochemical vapor deposition of alloy and mixe Low temperature photochemical vapor deposition of alloy and mixe

1990-08-28

1992-12-15

Padgett, Marianne

Coating processes

Direct application of electrical, magnetic, wave, or...

Chemical vapor deposition

427124, 4271262, 4271263, 427252, 4272553, 427584, B05D 306, B05D 512, C23C 1600

Patent

active

051716100

ABSTRACT:
Method and apparatus for formation of an alloy thin film, or a mixed metal oxide thin film, on a substrate at relatively low temperatures. Precursor vapor(s) containing the desired thin film constituents is positioned adjacent to the substrate and irradiated by light having wavelengths in a selected wavelength range, to dissociate the gas(es) and provide atoms or molecules containing only the desired constituents. These gases then deposit at relatively low temperatures as a thin film on the substrate. The precursor vapor(s) is formed by vaporization of one or more precursor materials, where the vaporization temperature(s) is selected to control the ratio of concentration of metals present in the precursor vapor(s) and/or the total precursor vapor pressure.

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