Semiconductor device manufacturing: process – Making passive device – Planar capacitor
Reexamination Certificate
2011-08-23
2011-08-23
Landau, Matthew C (Department: 2813)
Semiconductor device manufacturing: process
Making passive device
Planar capacitor
C257SE21015, C257SE21021
Reexamination Certificate
active
08003479
ABSTRACT:
Some embodiments of the invention include thin film capacitors formed on a package substrate of an integrated circuit package. At least one of the film capacitors includes a first electrode layer, a second electrode layer, and a dielectric layer between the first and second electrode layers. Each of the first and second electrode layers and the dielectric layer is formed individually and directly on the package substrate. Other embodiments are described and claimed.
REFERENCES:
patent: 6326258 (2001-12-01), Iizuka
patent: 6326285 (2001-12-01), Behfar et al.
patent: 6326316 (2001-12-01), Kiyotoshi et al.
patent: 6477034 (2002-11-01), Chakravorty et al.
patent: 6812130 (2004-11-01), Brase
patent: 6829133 (2004-12-01), Wermer et al.
patent: 6852416 (2005-02-01), Zhang et al.
patent: 6955925 (2005-10-01), Donohue et al.
patent: 7025607 (2006-04-01), Das et al.
patent: 2002/0134581 (2002-09-01), Figueroa
patent: 2003/0205406 (2003-11-01), Wermer et al.
patent: 2004/0147139 (2004-07-01), Jiang
patent: 2005/0094452 (2005-05-01), Lee et al.
patent: 2005/0185486 (2005-08-01), Lee et al.
patent: 2006/0000542 (2006-01-01), Min et al.
patent: 2006/0091495 (2006-05-01), Pallanduz et al.
patent: 2006/0097246 (2006-05-01), Palanduz et al.
patent: 2006/0099803 (2006-05-01), Min
patent: 2006/0220167 (2006-10-01), Min et al.
patent: 2006/0228855 (2006-10-01), Min et al.
patent: 2006/0281278 (2006-12-01), Min
patent: 2006/0289976 (2006-12-01), Min
patent: 2008/0145622 (2008-06-01), Roy et al.
patent: 1992-9171 (1992-10-01), None
patent: WO-2007117873 (2007-10-01), None
“International Application No. PCT/2007/064275 PCT Search Report”, (Sep. 4, 2007),5 pgs.
Achar, B. N., et al., “Phthalocyanine Polymers. II Synthesis and Characterization of Some Metal Phthalocyanine Sheet Oligomers.”,J. Polym. Sci. Polym. Chem., 20, (1982), 1785-1790.
Min, Y., et al., “Integrated Thin Film Capacitors With Adhesion Holes for the Improvement of Adhesion Strength”, U.S. Appl. No. 11/304,649, filed Dec. 14, 2005.
Min, Y., “Method of Providing a Via Opening in a Dielectric Film of a Thin Film of a Thin Film Capacitor”, U.S. Appl. No. 11/297,854, filed Dec. 8, 2005.
Zhang, Q. M., et al., “An All-Organic Composite Actuator Material With a High Dielectric Constant”,Nature, 419(6904), (Sep. 19, 2002), 284-287.
“U.S. Appl. No. 11/610,601 Non-Final Office Action mailed Aug. 24, 2009”, 15 Pgs.
“U.S. Appl. No. 11/610,601, Final Office Action mailed Jan. 6, 2010”, 19 pgs.
“U.S. Appl. No. 11/610,601, Response filed Sep. 24, 2009 to Non Final Office Action mailed Aug. 24, 2009”, 10 pgs.
“Chinese Application Serial No. 200780010702.6, Office Action mailed Jun. 8, 2010”, 15 pgs.
“Korean Application Serial No. 2008-7023433, Office Action mailed Aug. 4, 2010”, 7 pgs.
“Korean Application Serial No. 2008-7023433, Office Action mailed Jan. 12, 2011”, 7 pgs.
“Taiwan Application Serial No. 96109527 ,Office Action mailed Nov. 11, 2010”, 9 pgs.
Min Yongki
Salama Islam A.
Intel Corporation
Landau Matthew C
Luke Daniel
Schwegman Lundberg & Woessner, P.A.
LandOfFree
Low temperature deposition and ultra fast annealing of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Low temperature deposition and ultra fast annealing of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Low temperature deposition and ultra fast annealing of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2790842