Metal fusion bonding – With means to handle work or product – Work portion comprises electrical component
Reexamination Certificate
2005-03-01
2005-03-01
Edmondson, Lynne R. (Department: 1725)
Metal fusion bonding
With means to handle work or product
Work portion comprises electrical component
C228S047100, C414S217000
Reexamination Certificate
active
06860417
ABSTRACT:
A low shock work transport system for moving workpieces into a pressure vessel without significant vibrations or mechanical shocks. The pressure vessel has two opposing ends with a sealable port in each of the opposing ends. A vessel rail is contained entirely within the pressure vessel with the two ends of the rail adjacent the ends of the pressure vessel. A movable rail is adjacent each end of the pressure vessel. Each movable rail is movable between a first position in which one end of the movable rail is within the pressure vessel and contiguous with the adjacent end of the vessel rail, and a second position in which the one end of the movable rail is outside the pressure vessel such that the sealable ports can be sealed. The workpieces are moved by sliding them over the upper surfaces of the rails.
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Paul W. Barnes, “Sealing MEMS Devices in Ceramic Packages in a High Vacuum Atmosphere,” SST International Technical Bulletin.
Blakely , Sokoloff, Taylor & Zafman LLP
Edmondson Lynne R.
SierraTherm Production Furnaces, Inc.
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