Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent
1998-02-05
2000-07-04
King, Roy V
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
42725531, 427166, C23C 1630
Patent
active
060835613
ABSTRACT:
An improved chemical vapor deposition (CVD) process which is capable of providing low-scatter water-clear zinc sulfide bulk material is described. The improved method also minimizes bowing, or induced curvature, in the product bulk material. The product zinc sulfide material can be processed into thicker windows and optical devices than was possible with the articles produced by the previous CVD process. The improved process provides for a controlled gradual initial ramping up of the deposition rate and a controlled initial ramping down of the substrate temperature.
REFERENCES:
patent: 4944900 (1990-07-01), Willingham et al.
patent: 4978577 (1990-12-01), Purohit et al.
patent: 5077092 (1991-12-01), Smith et al.
patent: 5686195 (1997-11-01), Taylor et al.
Goela Jitendra Singh
Salihbegovic Zlatko
CVD Inc.
King Roy V
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