Low resistivity silicon carbide

Details Low resistivity silicon carbide Low resistivity silicon carbide

2006-03-28

2006-03-28

Group, Karl (Department: 1755)

Compositions: ceramic

Ceramic compositions

Carbide or oxycarbide containing

C501S092000, C252S516000

Reexamination Certificate

active

07018947

ABSTRACT:
Free standing articles of chemical vapor deposited silicon carbide with electrical resistivities of less than 0.9 ohm-cm are provided without substantially degrading its thermal conductivity or other properties.

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