Low resistivity silicon carbide

Details Low resistivity silicon carbide Low resistivity silicon carbide

2005-09-06

2005-09-06

Group, Karl (Department: 1755)

Compositions: ceramic

Ceramic compositions

Carbide or oxycarbide containing

C501S092000

Reexamination Certificate

active

06939821

ABSTRACT:
An opaque, low resistivity silicon carbide and a method of making the opaque, low resistivity silicon carbide. The opaque, low resistivity silicon carbide is doped with a sufficient amount of nitrogen to provide the desired properties of the silicon carbide. The opaque, low resistivity silicon carbide is a free-standing bulk material that may be machined to form furniture used for holding semi-conductor wafers during processing of the wafers. The opaque, low resistivity silicon carbide is opaque at wavelengths of light where semi-conductor wafers are processed. Such opaqueness provides for improved semi-conductor wafer manufacturing. Edge rings fashioned from the opaque, low resistivity silicon carbide can be employed in RTP chambers.

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