Low resistance, high breakdown voltage, power mosfet

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With large area flexible electrodes in press contact with...

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Details

257343, H01L 2976, H01L 2994

Patent

active

058982019

ABSTRACT:
A metal oxide semiconductor field effect transistor power device with a lightly doped silicon substrate includes a source region and a drain region. At least one field implanted island region is formed along the surface of the substrate between the source and drain regions with a field oxide region formed above the field implanted region, a dielectric layer and a gate electrode formed over the substrate, and self-aligned source and drain regions implanted into the device with external electrodes connected thereto.

REFERENCES:
patent: 5019522 (1991-05-01), Meyer et al.
patent: 5258641 (1993-11-01), Kida et al.
patent: 5322804 (1994-06-01), Beasom

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