Low profile, low hysteresis force feedback gimbal system for che

Details Low profile, low hysteresis force feedback gimbal system for che Low profile, low hysteresis force feedback gimbal system for che

1997-07-25

1999-05-04

Eley, Timothy V.

Abrading

Machine

Rotary tool

451288, 451398, 384193, 384206, B24B 2902, B24B 4710, F16C 2304

Patent

active

058997989

ABSTRACT:
A low profile, low hysteresis force feedback gimbal system is provided to greatly reduce the generation of moments about a pivot point of the gimbal system during polishing processes. A load cell is placed directly above a contact pin of the gimbal system to provide a very accurate feedback measurement of the amount of downward load applied to a substrate during polishing.

REFERENCES:
patent: 3374582 (1968-03-01), Boettcher
patent: 3698776 (1972-10-01), Litman et al.
patent: 3731435 (1973-05-01), Boettcher et al.
patent: 3781071 (1973-12-01), Kauzlarich
patent: 3977130 (1976-08-01), Degner
patent: 5618227 (1997-04-01), Tsutsumi et al.
patent: 5624299 (1997-04-01), Shendon
patent: 5643053 (1997-07-01), Shendon

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