Low-pressure process apparatus

Details Low-pressure process apparatus Low-pressure process apparatus

2011-06-14

2011-06-14

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Disassembling

C029S284000, C156S382000

Reexamination Certificate

active

07958612

ABSTRACT:
A low-pressure process apparatus for processing a substrate comprises a base, a stage, a housing and at least one first roller set. The stage is disposed on the base for supporting the substrate. The housing is detachably disposed on the base moving between a first position and a second position, wherein when the housing is in a first position, the housing and the base form a chamber to receive the stage. When the housing is detached, the first roller set contacts and supports the housing to facilitate movement thereof in a first horizontal direction.

REFERENCES:
patent: 3641681 (1972-02-01), Brock
patent: 3843916 (1974-10-01), Trotel et al.
patent: 4341592 (1982-07-01), Shortes et al.
patent: 4714511 (1987-12-01), Nakao
patent: 4915777 (1990-04-01), Jucha et al.
patent: 5226056 (1993-07-01), Kikuchi et al.
patent: 5320707 (1994-06-01), Kanekiyo et al.
patent: 5388945 (1995-02-01), Garric et al.
patent: 6092578 (2000-07-01), Machida et al.
patent: 7749351 (2010-07-01), Kataoka et al.
patent: 07-335923 (1995-12-01), None
patent: 08-288371 (1996-11-01), None
patent: 2005-19967 (2005-01-01), None
patent: 2006253517 (2006-09-01), None
English language translation of JP 07-335923 (published Dec. 22, 1995).
English language translation of JP 08-288371 (published Nov. 1, 1996).
English language translation of JP 2005-19967 (published Jan. 20, 2005).

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