Low pressure plasma treatment of an article surface

Coating processes – Direct application of electrical – magnetic – wave – or... – Polymerization of coating utilizing direct application of...

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427488, 427535, 427536, 264446, 264453, 264483, 264494, 264 83, C08J 718, B01D 4700, B01D 4716

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active

055609635

ABSTRACT:
A method of producing a plasma treated article in a tool having electrically isolated conductive members, wherein at least one of the members has a surface closely conforming to the surface of the article which is to be treated. The method includes the steps of placing the article between the members so as to create a relatively small bounded space between the article surface and the closely conforming member surface, drawing a vacuum in the bounded space, introducing a polymerizable gas into the bounded space and applying an electric field between the members to create a plasma in the bounded space to react with the article surface.

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