Low-pressure dryer and low-pressure drying method

Details Low-pressure dryer and low-pressure drying method Low-pressure dryer and low-pressure drying method

2006-04-11

2006-04-11

Bennett, Henry (Department: 3743)

Drying and gas or vapor contact with solids

Process

Gas or vapor contact with treated material

C034S107000, C034S201000, C134S902000, C134S200000, C134S140000, C134S182000

Reexamination Certificate

active

07024798

ABSTRACT:
A low-pressure dryer dries a substrate applied a coating solution thereon at low pressure. The dryer includes an airtight chamber installing a substrate table to place the substrate thereon; a diffuser plate, provided as facing the substrate placed on the substrate table with a gap, for discharging gas existing in the gap toward outside, the diffuser plate having a size almost the same as or larger than the substrate; a substrate-temperature adjuster, installed in the substrate table, for adjusting a temperature of the substrate; and a decompression mechanism for decompressing the airtight chamber. The diffuser plate has a temperature adjuster for making temperature adjustments to have a temperature difference between a first region and a second region of the diffuser plate, the first region facing a center region of the substrate, the second region being outside the first region and including a region facing an outer region of the substrate.

REFERENCES:
patent: 5581905 (1996-12-01), Huelsman et al.
patent: 6190459 (2001-02-01), Takeshita et al.
patent: 6222161 (2001-04-01), Shirakawa et al.
patent: 6273104 (2001-08-01), Shinbara et al.
patent: 6431190 (2002-08-01), Oka et al.
patent: 6588437 (2003-07-01), Higashi

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