Low-power thermopneumatic microvalve

Valves and valve actuation – Heat or buoyancy motor actuated

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137341, F16K 3102

Patent

active

061293318

ABSTRACT:
A thernopneumatic valve comprises a fluid channel plate defining a fluid port. A diaphragm plate is attached to the fluid channel plate. The diaphragm plate includes a displaceable diaphragm to selectively obstruct the fluid port of the fluid channel plate. A thermal isolating heater is connected to the diaphragm plate. The thermal isolating heater includes a thermal isolating heater body with a heating surface, a perimeter wall defining an extended axial cavity to confine a thermopneumatic working fluid that is used to control the position of the displaceable diaphragm, and a diaphragm obstruction structure to limit the motion of the displaceable diaphragm into the extended axial cavity.

REFERENCES:
patent: 2833507 (1958-05-01), Dube et al.
patent: 4347976 (1982-09-01), Jakobsen
patent: 4821997 (1989-04-01), Zdeblick

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