Low power consumption bistable microswitch

Details Low power consumption bistable microswitch Low power consumption bistable microswitch

2004-06-30

2009-02-10

Vortman, Anatoly (Department: 2835)

Electricity: electrothermally or thermally actuated switches

Electrothermally actuated switches

With bimetallic elements

C337S036000, C337S139000, C337S141000, C337S053000, C337S365000, C060S529000, C310S307000

Reexamination Certificate

active

07489228

ABSTRACT:
A bistable MEMS microswitch produced on a substrate and capable of electrically connecting ends of at least two conductive tracks, including a beam suspended above the surface of the substrate. The beam is embedded at its two ends and is subjected to compressive stress when it is in the non-deformed position. The beam has an electrical contact configured to produce a lateral connection with the ends of the two conductive tracks when the beam is deformed in a horizontal direction with respect to the surface of the substrate. Actuators enable the beam to be placed in a first deformed position, corresponding to a first stable state, or in a second deformed position, corresponding to a second stable state, and the electrical contact ensures connection of the ends of the two conductive tracks.

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