Low particle wafer automatic flat aligner

Details Low particle wafer automatic flat aligner Low particle wafer automatic flat aligner

1993-08-20

1995-01-24

Huppert, Michael S.

Material or article handling

Apparatus particularly adapted for charging or discharging a...

With means to transfer, or facilitate transfer of, vehicle...

198394, 414433, 414936, 414786, B65G 4724

Patent

active

053837592

ABSTRACT:
Disclosed is an apparatus and method for aligning the flat edges of semiconductor wafers in a wafer cassette. The apparatus includes a roller and alignment blade mounted in a frame on which the wafer cassette is mounted. A motor mechanism rotates the roller and alignment blade to align the wafer flat edges.

REFERENCES:
patent: 4662811 (1987-05-01), Hayden
patent: 5028200 (1991-07-01), Shimane

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