Low oxygen heater

Details Low oxygen heater Low oxygen heater

1997-09-30

1999-06-15

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

117217, 117222, C30B 3500

Patent

active

059118253

ABSTRACT:
A heater is configured to reduce oxygen in the melt near the growing crystal is provided by defining a high temperature region in an upper region of the heater, above a melt surface of semiconductor material from which a crystal is grown. This effectively shifts the heat balance of the system upwards, and alters thermal convections of oxygen within the melt. Accordingly, the primary vehicle for transporting oxygen to the growing crystal is suppressed.

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patent: 5660752 (1997-08-01), Vilzmann
patent: 5766347 (1998-06-01), Shimomura et al.

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