Low non-linear error displacement measuring interferometer

Details Low non-linear error displacement measuring interferometer Low non-linear error displacement measuring interferometer

2007-07-31

2007-07-31

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

By light interference

Having light beams of different frequencies

C356S491000

Reexamination Certificate

active

11118949

ABSTRACT:
An interferometer is provided that minimizes the introduction of non-linear errors into displacement measurements. In one embodiment, non-linear errors are reduced by isolating reference and measurement beams over most of their respective optical paths leading to the detector, and by employing a separate amplitude-splitting non-polarizing optical beam splitter for each beam input into the interferometer. Additionally, the interferometer is scalable to an arbitrary number of optical axes or inputs.

REFERENCES:
patent: 5064280 (1991-11-01), Ringens et al.
patent: 5677768 (1997-10-01), Bockman
patent: 6542247 (2003-04-01), Bockman
patent: 6631004 (2003-10-01), Hill et al.
patent: 2005/0008322 (2005-01-01), Sullivan et al.

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