Low noise fluid flow sensor mounting

Details Low noise fluid flow sensor mounting Low noise fluid flow sensor mounting

1991-01-07

1992-02-11

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

7320426, G01F 168

Patent

active

050866508

ABSTRACT:
An airflow sensor in a flat chip configuration having sensing elements on only one side is subject to causing turbulence in the airflow which has a deleterious effect on the flow signal. The turbulence is diminished or prevented and sensitivity is enhanced by tilting the plane of the sensor a few degrees to the flow direction. Flow in both directions through a passage is measured by bending the passage at the sensor location so that the flow in either direction is inclined to the surface carrying the sensing elements. Flow in both directions through a straight passage is measured by providing the sensor with sensing elements on both sides and mounting the sensor at a tilt so that flow in both directions is inclined to a surface of the sensor.

REFERENCES:
patent: 4587842 (1986-05-01), Handtmann
patent: 4955230 (1986-09-01), Hall
patent: 4981035 (1991-01-01), Hall
patent: 5024083 (1991-06-01), Inada et al.
L. L. Kazmerski, "Electrical and Optical Properties of Polycrystalline Semiconductor Thin Films", published in Polycrystalline and Amorphous Thin Films and Devices, L. L. Dazmerski, Editor, Academic Press, New York, 1980, p. 104.

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