Low metals perfluorooctanoic acid and top anti-reflective coatin

Details Low metals perfluorooctanoic acid and top anti-reflective coatin Low metals perfluorooctanoic acid and top anti-reflective coatin

1995-09-29

1998-11-03

Szekely, Peter A.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Treating polymer containing material or treating a solid...

430331, 430338, 524319, 524428, 524462, 524463, 524556, 521 26, 528490, 528499, C08F 606, C08J 307

Patent

active

058309900

ABSTRACT:
The present invention provides methods for producing top anti-reflective coating compositions having a very low level of metal ions, utilizing a specially washed and modified ion exchange resin. A method is also provided for producing semiconductor devices using such ion exchange treated top anti-reflective coating compositions.

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