Low mass magnetic recording head and suspension

Details Low mass magnetic recording head and suspension Low mass magnetic recording head and suspension

1996-01-10

1998-04-21

Tupper, Robert S.

Dynamic magnetic information storage or retrieval

Record transport with head stationary during transducing

Drum record

360126, G11B 5596, G11B 531

Patent

active

057424527

ABSTRACT:
A integral magnetic head and suspension and method for making the same. The integral head and suspension are fabricated completely on silicon (Si) wafers using semiconductor processes. A N+ silicon layer is disposed over a P- silicon wafer. The N+ silicon layer and the P-silicon wafer are thermally oxidized to generate a bottom silicon oxide layer opposite the N+ layer side of the wafer and a top silicon oxide layer on the N+ side of the wafer, and to drive the N+ silicon into the P- silicon wafer. A layer of polysilicon is disposed over the silicon oxide layer on top of the N+ silicon layer and is then patterned to define the head structure and suspension structure as one piece. Then, a magnetic head is disposed on the polysilicon. Finally, the magnetic head and suspension are separated from the wafer by removing the first silicon oxide layer by a chemical etchant and the P- silicon wafer by selective etching. The head and suspension are released from the silicon wafer as a single structure using the above-described semiconductor processes. Accordingly, no grinding or cutting is used to define the dimensions of the head. Further, no processes are required to attach the head to the suspension and the suspension can be made from low mass materials such as silicon (Si) or Al.sub.2 O.sub.3.

REFERENCES:
patent: 4418472 (1983-12-01), Lorenze, Jr.
patent: 4837924 (1989-06-01), Lazzari
patent: 4949207 (1990-08-01), Lazzari
patent: 5163218 (1992-11-01), Hamilton
patent: 5228184 (1993-07-01), Kishi
patent: 5274520 (1993-12-01), Matsuzono et al.
patent: 5408373 (1995-04-01), Bajorek et al.

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