Low mass in the acoustic path flexible circuit interconnect and

Details Low mass in the acoustic path flexible circuit interconnect and Low mass in the acoustic path flexible circuit interconnect and

1996-11-22

1999-07-13

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310365, H01L 4108

Patent

active

059231157

ABSTRACT:
A low mass in the acoustic path flex circuit that has a thin metal layer in the acoustic path area and thicker electrical traces. The low mass flex circuit allows for mass termination of the signal and ground traces with the electrodes of the piezoelectric piezoelements. Regions that are to be diced are reduced in thickness to decrease the loading on the dicing blade during fabrication.

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