Low-mass and compact stage devices exhibiting six degrees of...

Details Low-mass and compact stage devices exhibiting six degrees of... Low-mass and compact stage devices exhibiting six degrees of...

2005-03-15

2005-03-15

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S012060

Reexamination Certificate

active

06867534

ABSTRACT:
Low-mass and compact stage devices are disclosed that exhibit, compared to conventional stage devices, reduced magnetic field fluctuations. An embodiment of such a stage device includes an X-Y coarse-movement stage portion that is drivable in the X-Y directions using respective air cylinders. A fine-movement stage portion is mounted on the X-Y coarse-movement stage portion. The fine-movement stage portion is drivable in any of the six degrees of freedom of motion (i.e., X, Y, Z, θX, θY, and θZmotions) relative to the coarse-movement stage portion. Such fine movements are achieved using six piezo actuators. In a stage device configured for use in a microlithography apparatus, a wafer table or reticle table can be mounted on the fine-movement table.

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U.S. Appl. No. 10/003,357, filed Nov. 14, 2001, Miura et al.

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