Low-loss waveguide and method of making same

Details Low-loss waveguide and method of making same Low-loss waveguide and method of making same

2005-02-01

2005-02-01

Ullah, Akm Enayet (Department: 2874)

Optical waveguides

Planar optical waveguide

C385S130000, C385S131000, C385S132000, C065S386000, C216S024000

Reexamination Certificate

active

06850683

ABSTRACT:
A method of reducing the scattering losses that involves smoothing of the core/cladding interface and/or change of waveguide geometry in high refractive index difference waveguides. As an example, the SOI-based Si/SiO2waveguides are subjected to an oxidation reaction at high temperatures, after the waveguide patterning process. By oxidizing the rough silicon core surfaces after the patterning process, the core/cladding interfaces are smoothened, reducing the roughness scattering in waveguides.

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