Low loss optical switching system

Optical waveguides – With optical coupler – Switch

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C385S017000, C385S020000, C385S024000, C385S025000, C385S040000, C359S618000

Reexamination Certificate

active

07003188

ABSTRACT:
An optical switching system that switches the path of an optical signal by moving a microstructure onto which a light-guiding structure is mounted. The microstructure is formed by a MEMs and semiconductor process to be integral to the substrate. The light-guiding structure may include waveguides. The microstructure moves from one position to another position (e.g., laterally, vertically, rotationally) such that incoming optical signals align over a small air gap to different optical paths, depending on the position of the movable microstructure. As a result, the optical signal propagate along different optical paths (e.g., straight pass through or cross over) depending on the position of the movable microstructure. The optical paths have a large radii of curvature so as to change the direction of the optical signal gradually, thereby reducing insertion losses. By combining optical switches in both the vertical and horizontal directions, the resulting optical switching system handles switching in three dimensions.

REFERENCES:
patent: 4693547 (1987-09-01), Soref et al.
patent: 5039191 (1991-08-01), Myszka
patent: 5095519 (1992-03-01), Dorsey
patent: 5235672 (1993-08-01), Carson
patent: 5245458 (1993-09-01), Taylor
patent: 5278692 (1994-01-01), Delapierre
patent: 5357590 (1994-10-01), Auracher
patent: 5596662 (1997-01-01), Boscher
patent: 5612815 (1997-03-01), Labeye et al.
patent: 5623564 (1997-04-01), Presby
patent: 5671304 (1997-09-01), Duguay
patent: 5727099 (1998-03-01), Harman
patent: 5757986 (1998-05-01), Crampton et al.
patent: 5761350 (1998-06-01), Koh
patent: 5828800 (1998-10-01), Henry et al.
patent: 5848206 (1998-12-01), Labeye et al.
patent: 5864643 (1999-01-01), Pan
patent: 5920665 (1999-07-01), Presby
patent: 5923798 (1999-07-01), Aksyuk et al.
patent: 5926594 (1999-07-01), Song et al.
patent: 5970192 (1999-10-01), Osugi et al.
patent: 5990473 (1999-11-01), Dickey et al.
patent: 6072924 (2000-06-01), Sato et al.
patent: 6101299 (2000-08-01), Laor
patent: 6102582 (2000-08-01), Espindola et al.
patent: 6122423 (2000-09-01), You et al.
patent: 6137941 (2000-10-01), Robinson
patent: 6148124 (2000-11-01), Aksyuk et al.
patent: 6169826 (2001-01-01), Nishiyama et al.
patent: 6175675 (2001-01-01), Lee et al.
patent: 6205267 (2001-03-01), Aksyuk et al.
patent: 6219472 (2001-04-01), Horino et al.
patent: 6253011 (2001-06-01), Haake et al.
patent: 6275326 (2001-08-01), Bhlia et al.
patent: 6295154 (2001-09-01), Laor et al.
patent: 6388798 (2002-05-01), Smith et al.
patent: 6411765 (2002-06-01), Ono
patent: 6526198 (2003-02-01), Wu et al.
patent: 6647168 (2003-11-01), Hsu et al.
patent: 6647170 (2003-11-01), Hsu
patent: 6654523 (2003-11-01), Cole
patent: 6690847 (2004-02-01), Hsu
patent: 6694071 (2004-02-01), Hsu
patent: 2002/0054748 (2002-05-01), Hsu
patent: 2002/0094151 (2002-07-01), Li
patent: 3817035 (1989-08-01), None
patent: 0 545 584 (1992-11-01), None
patent: 1004910 (2000-05-01), None
patent: 00 15751 (2002-06-01), None
patent: 58068702 (1983-04-01), None
patent: 63063006 (1988-03-01), None
patent: 04177225 (1992-06-01), None
patent: 06109990 (1994-04-01), None
patent: 10123373 (1998-05-01), None
patent: 10-227986 (1998-08-01), None
patent: WO 01/77742 (2001-10-01), None
Benaissa, K.; and Nathan, A.; “Silicon Anti-Resonant Reflecting Optical Waveguides for Sensor Applications;”Journal of Sensors and Actuators(A Physical), A65, 33-44, 1998.
Broekemoto, Takuji; Noguchi, Yutaka; et al., “Polyimide Optical Waveguides With Multi-Fan-Out for Multi-Chip Module Application;”Proceedings of the 27thEuropean Solid-State Device Research Conference, France, Sep. 22-24, 1997.
Brown, K.S.; Taylor, B.J.; Dawson; J.M.; Hornak, L.A.; “Polymer Waveguide Co-integration With Microelectromechanical Systems (MEMS) for Integrated Optical Metrology;”Proceedings of the SPIE(The International Society for Optical Engineering), vol. 3276, 1998.
Burcham, Kevin E.; and Boyd, Joseph T.; “Freestanding, Micromachined, Multimode Silicon Optical Waveguides at λ= 1.3 μm for Microelectromechanical System Technology;”Journal of Applied Optics, vol. 37, No. 36, Dec. 20, 1998.
Churenkov, A.V.; “Silicon Micromechanical Optical Waveguide for Sensing and Modulation;”Journal of Sensors and Actuators(A Physical), vol. A57, No. 1, Oct. 1996.
Cook, J.P.D.; Este, G.O.; Shepherd, F.R.; et al.; “Stable, Low-Loss Optical Waveguides and Micromirrors Fabricated in Acrylate Polymers”Applied Optics Journal, vol. 37, No. 7, Mar. 1, 1998.
Cornett, Kimberly T.; Heritage, Jonathan P.; Solgaard, Olav; “Compact Optical Delay Line Based on Scanning Surface Micromachined Polysilicon Mirrors;”2000 IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, Aug. 21-24, 2000.
de Labachelerie, M.; Kaou, N.; et al.; “A Micromachined Connector for the Coupling of Optical Waveguides and Ribbon Optical Fibers;”Journal of Sensors and Actuators(A Physical), vol. A89, No. 1-2, Mar. 20, 2001.
Eng, Terry T.H.; Kan, Sidney C.; and Wong, George K.L.; “Voltage-Controlled Micromechanical SOI Optical Waveguides;” IEEE TENCON, IEEE Region 10 International Conference on Microelectronics and VLSL—“ Asia Pacific Microelectronics 2000”—Proceedings, 1995, Dec. 9, 2002.
Eng, Terry T.H.; Kan, Sidney C.; and Wong, George K.L.; “Surface-Micromachined Epitaxial Silicon Cantilevers as Movable Optical Waveguides on Silicon-on-Insulator Substrates;”Journal on Sensors and Actuators A, Physical, vol. A49, No. 1-2, Jun. 1995.
Eng, Terry T.H.; Kan, Sidney C.; and Wong, George K.L.; “Surface-Micromachined Movable SOI Optical Waveguides;”Proceedings of the International Solid-State Sensors and Actuators Conference—Transducer, 1995.
Gorecki, Christopher; “Optimization of Plasma-Deposited Silicon Oxinitride Films for Optical Channel Waveguides;”Journal of Optics and Laser Engineering, vol. 33, No. 1, Jan. 2000.
Haronian, D.; “Bottlenecks of Opto-MEMS;”SPIE Proceedings—Micro-Opto-Electro-Mechanical Systems, Glasgow, UK, May 22-23, 2000.
Haronian, D.; “Displacement Sensing Using Geometrical Modulation in Reflection Mode (GM-RM) of Coupled Optical Waveguides;”Journal of Micromechanics and Microengineering, vol. 8, No. 4, Dec. 1998.
Haronian, D.; “Suspended Optical Waveguide With In-Plane Degree of Freedom or Microelectro-Mechanical Applications;”Electronics Letters, vol. 34, No. 7, 2ndApr. 1998.
Hoffmann, Martin; Kopka, Peter; and Voges, Edgar; “Thermooptical Digital Switch Arrays in Silica-on-Silicon With Defined Zero-Voltage State;”Journal of Lightwave Technology, vol. 16, No. 3, Mar. 1998.
Jin, Young-Hyun; Seo, Kyoung-Sun; et al.; “An SOI Optical Microswitch Integrated With Silicon Waveguides and Touch-down Micromirror Actuators;” 2000 IEEE/LEOS International Conference on Optical MEMS, Aug. 21-24, 2000.
Koyanagi, Mitsumasa; “Optical Interconnection Using Polyimide Waveguide for Multi-Chip Module;”Proceedings of SPIE, Society of Photo-Optical Instrumentation Engineers, San Jose, CA, 1996.
Kruger, Michiel V.P.; Guddal, Michael H.; et al.; “Low Power Wireless Readout of Autonomous Sensor Wafer Using MEMS Grating Light Modulator;”2000 IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, Aug. 21-24, 2000.
Kuwana, Yasuhiro;Hirose, Akinori; Kurino, Hiroyuki; et al.; “Signal Propagation Characteristics in Polyimide Optical Wave-guide With Micro-Mirrors for Optical Multichip Module;”Japanese Journal of Applied Physics, vol. 38, No. 4B, Apr. 1999.
Makihara, M.; “Microelectromechanical Intersecting Waveguide Optical Switch Based on Thermo-Capillarity;”2000 IEEE/LEOS International Conference on Optical MEMS, Kauai, Hawaii, Aug. 21-24, 2000.
Makihara, M.; Sato, Makoto; Shimokawa, Fusao; et al.; “Micromechanical Optical Switches Based on Thermocapillary Integrated in Waveguide Substrate;”Journal of Lightwa

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Low loss optical switching system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Low loss optical switching system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Low loss optical switching system will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3674488

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.