Low loss contact structures for silicon based optical...

Details Low loss contact structures for silicon based optical... Low loss contact structures for silicon based optical...

2006-12-12

2006-12-12

Pak, Sung (Department: 2874)

Optical waveguides

With optical coupler

Particular coupling structure

C385S008000

Reexamination Certificate

active

07149388

ABSTRACT:
The present invention provides silicon based thin-film structures that can be used to form high frequency optical modulators. Devices of the invention are formed as layered structures that have a thin-film dielectric layer, such as silicon dioxide, sandwiched between silicon layers. In one aspect of the invention an electrical contact structure is provided. The electrical contact structure comprises a connecting portion that electrically connects an active region of at least one of the silicon layers to a contact portion of the electrical contact structure.

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