Low-gas temperature stabilization system

Details Low-gas temperature stabilization system Low-gas temperature stabilization system

1995-08-30

1996-05-28

Moulis, Thomas N.

Heating

Work chamber having heating means

Work chamber having gaseous material supply or removal...

432 24, 432 47, F27B 504, F27D 1900

Patent

active

055205380

ABSTRACT:
The temperature of articles in an "environmental" chamber is stabilized by evacuation of the "environmental" chamber, after having stabilized the temperature of such an article to approximate that of a controlled-temperature member spaced from the article by a small gap, to a pressure just sufficient to provide viscous gas behavior, adjusting the temperature of the article to closely match that of the member by gas conduction heat transfer across the gap, and evacuating the chamber to high vacuum.

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patent: 5090900 (1992-02-01), Rudolf et al.
patent: 5180276 (1993-01-01), Hendrickson
patent: 5273423 (1993-12-01), Shiraiwa

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