Low-force electrochemical mechanical processing method and...

Details Low-force electrochemical mechanical processing method and... Low-force electrochemical mechanical processing method and...

2007-07-03

2007-07-03

King, Roy (Department: 1742)

Abrading

Machine

Rotary tool

C204S22400M, C204S22400M, C205S640000, C205S662000, C205S663000, C205S670000, C451S317000, C451S413000, C451S283000, C451S285000, C451S287000

Reexamination Certificate

active

10155828

ABSTRACT:
The present invention relates to semiconductor integrated circuit technology and discloses an electrochemical mechanical processing system for uniformly distributing an applied force to a workpiece surface. The system includes a workpiece carrier for positioning or holding the workpiece surface and a workpiece-surface-influencing-device (WSID). The WSID is used to uniformly distribute the applied force to the workpiece surface and includes various layers that are used to process and apply a uniform and global force to the workpiece surface.

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