Low-energy method for fabrication of large-area sputtering...

Powder metallurgy processes – Forming articles by uniting randomly associated metal particles

Reexamination Certificate

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C204S298120, C204S298130, C427S181000, C427S446000

Reexamination Certificate

active

07910051

ABSTRACT:
In various embodiments, large-area sputtering targets are formed by providing a plurality of sputtering targets each comprising a backing plate and a refractory metal layer disposed thereon, and spray depositing a refractory metal powder on an interface between the sputtering targets, the refractory metal powder consisting essentially of the same metal as each refractory metal layer, thereby joining the refractory metal layers of the sputtering targets.

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