Optical waveguides – Optical waveguide sensor
Reexamination Certificate
2007-05-15
2007-05-15
Leung, Quyen (Department: 2874)
Optical waveguides
Optical waveguide sensor
C385S037000, C385S130000, C385S131000
Reexamination Certificate
active
11292400
ABSTRACT:
A planar waveguide grating (PWG) sensor is described herein which exhibits a low signal drift and an enhanced sensitivity due to the use of a fully dense silicon-rich nitride surface layer. In the preferred embodiment, the silicon rich silicon nitride surface layer has a composition which includes Si and N, and optionally H, Ge and/or O, where a Si/N atomic ratio is greater than 0.75. In addition, the silicon rich nitride surface layer has a refractive index that is greater than 2.45 and less than 3.2 at a wavelength of operation. A method is also described herein for manufacturing the PWG sensor with acceptable costs and high yields by utilizing well known semiconductor processes and tools.
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Bellman Robert A.
Wang Chuan-che
Beall Thomas R.
Corning Incorporated
Leung Quyen
Tucker, Esq. William J.
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