Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate
2006-07-11
2006-07-11
Stein, Stephen (Department: 1775)
Stock material or miscellaneous articles
Composite
Of silicon containing
C428S446000, C428S697000
Reexamination Certificate
active
07074489
ABSTRACT:
Organofluorosilicate glass films contain both organic species and inorganic fluorines, exclusive of significant amounts of fluorocarbon species. Preferred films are represented by the formula SivOwCxHyFz, where v+w+x+y+z=100%, v is from 10 to 35 atomic %, w is from 10 to 65 atomic % y is from 10 to 50 atomic %, x is from 1 to 30 atomic %, z is from 0.1 to 15 atomic %, and x/z is optionally greater than 0.25, wherein substantially none of the fluorine is bonded to the carbon. In one embodiment there is provided a CVD method that includes: providing a substrate within a vacuum chamber; introducing into the vacuum chamber gaseous reagents including a fluorine-providing gas, an oxygen-providing gas and at least one precursor gas selected from an organosilane and an organosiloxane; and applying energy to the gaseous reagents in the chamber to induce reaction of the gaseous reagents and to form the film on the substrate.
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Bitner Mark Daniel
Lukas Aaron Scott
O'Neill Mark Leonard
Peterson Brian K.
Vincent Jean Louise
Air Products and Chemicals Inc.
Morris-Oskanian Rosaleen P.
Stein Stephen
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