Dynamic magnetic information storage or retrieval – Head – Core
Reexamination Certificate
2006-10-24
2006-10-24
Nguyen, Hoa T. (Department: 2627)
Dynamic magnetic information storage or retrieval
Head
Core
Reexamination Certificate
active
07126789
ABSTRACT:
Present processes used for planarizing a cavity filled with a coil and hard baked photoresist require that a significant amount of the thickness of the coils be removed. This increases the DC resistance of the coil. In the present invention, CMP is terminated as soon as the coils are exposed, allowing their full thickness to be retained and resulting in minimum DC resistance. Application of this process to the manufacture of a planar magnetic write head is described.
REFERENCES:
patent: 6262867 (2001-07-01), Sano et al.
patent: 6385009 (2002-05-01), Sano et al.
patent: 6490131 (2002-12-01), Sano et al.
Chen Mao-Min
Han Cherng Chyi
Blouin Mark
Nguyen Hoa T.
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