Low-damage multilayer mirror for the soft X-ray region

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis

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378 85, 378145, G21K 106

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053073959

ABSTRACT:
A mirror for reflecting radiation at a desired wavelength in the soft x-ray region, comprises a substrate and a coating on the substrate. The coating contains a first section and a second section. The first section comprises at least one layer made up of at least a spacer sublayer and a nodal sublayer. The optical thickness of each spacer sublayer is selected so that, upon application of the radiation of desired wavelength, the mirror generates a standing wave having a node in the middle of each nodal sublayer. The second section is disposed between the first section and the substrate, and comprises a plurality of optically absorptive layers.

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